UV-LED Light Engine ALE/1C
Function Overview:
The Honghong ALE/1C UV-LED exposure system utilizes an advanced mercury-free design with built-in high-efficiency UV radiation output to replace traditional high-power mercury lamps, and supports a broadband output range of 350-450nm. The system's decentralized design provides flexibility and stability, and offers a wide range of optical options for long-distance radiation transmission and high-power industrial applications. Powerful cooling system and LED closed-loop control ensures long-time operation stability and is suitable for a wide range of industrial scenarios.
描述
ALE/1C UV-LED Exposure System Integration in Masking Plate System
The ALE/1C light source follows a decentralized design approach and typically consists of a Control Subsystem (CSS) and one or more independent Exposure Subsystems (ESS) in a very compact structure suitable for industrial integration.
Control Subsystem (CSS)
As a self-contained unit and 4U 19” rack-mounted system.
Includes power supply, cooling system and external interfaces
Exposure Subsystem (ESS)
Compact design for direct integration into exposure equipment.
Includes emitters for i-, h- and g-lines and LED drivers.
ALE/1C UV-LED Exposure System Replaces Conventional 1 kW Light Boxes
Primelite's UV-LED Exposure System, the Advanced Light Engine ONE C (ALE/1C), is a powerful concentrated light source that drives many high-performance industrial UV exposure tools. Typically, these are semi-automatic and automatic mask aligners for 6-inch (150 mm) and 8-inch (200 mm) wafers or broadband wafer stepping systems (1X steppers/mini steppers). It utilizes UV-LED technology for excellent output stability and flexible spectral control, superior to conventional high-pressure mercury discharge lamps. It also consumes less power, does not generate as much heat, lasts longer, and requires minimal overall maintenance.
At Primelite, we've built our products to be versatile platforms, and the ALE/1C UV-LED Exposure Systems are no exception - they allow you to combine up to three UV LEDs in the light path. In most cases, these are i-line (CWL 365 nm), h-line (CWL 405 nm), and g-line (CWL 436 nm) emitters, which illuminate with more power than a conventional 1 kW mercury discharge lamp.
Primelite Lithography UV-LED Exposure System ALE/2 (Controller and Exposure Subsystem)
ALE/1C UV-LED exposure system highlights:
- Built-in solutions for maximum exposure efficiency and performance
- Broadband exposure up to 50 watts (350 - 450 nm)
- Closed-loop controlled light output for maximum process stability
- Mercury-free! Safe and future-proof LED light source
- UV-LED technology for longer life and lower TCO
- Quality made in Germany
Exposure Light System
The following table shows the specifications of Macrohon's exposure light source system, some parameters are subject to customization.
| Category | parameters | Remarks |
|---|---|---|
| Light Source Type | LED | 1064/532/355/266 nm |
| Center Wavelength | 365nm, 385nm, 405nm, 435nm | 367.5±2.5 nm, 387.5±2.5 nm, 402.5±2.5 nm, 435.0±2.5 nm Actual data depends on model/testing |
| FWHM | 10-15nm | Actual data depends on model/testing |
| optical power | Single wavelength 17-30W | Can be customized according to specific needs |
| Light area | 4 "x12" | Can be customized according to specific needs |
| power density | 25-150mW/cm² | Depends on application and size |
| Light uniformity | ≥97% | |
| parallel light scope | <3° | |
| Z Lift range | 100-400mm | Can be customized according to specific needs |
| Cooling Method | Liquid Cooling, Hot Air Cooling | |
| Work/Storage | Exposure time: 1000-30000 hours | Depends on specific usage conditions. Reference value: 5000 hours 50mW/cm² 50% duty |
ALE/1C UV-LED Exposure System Outputs
Our standard ALE/1C setup combines UV-LED emitters with peak wavelengths near the i-line (365 nm), h-line (405 nm) and g-line (436 nm) of the mercury spectrum. All UV-LED emitters can be controlled individually, so you can switch wavelengths and customize the composition of the output spectrum without changing filters.
Spectrum
Angular distribution (from light pipes)
power (output)
| Radiant power (mW)¹ | optics | Broadband (350 - 450 nm) | i-line (365 nm) |
|---|---|---|---|
| ALE/1C (high performance mode) | Ø8.0 mm HEX AR | 50,000 | 21,000 |
| ALE/1C (standard mode) | Ø8.0 mm HEX AR | 40,000 | 17,000 |
¹ Deviation may be ±10%
Our ALE/1C provides up to 40 W total output in standard mode and 50 W in high performance mode.
To activate High Performance Mode, you will need to install an additional cooler in the cooling circuit to keep the coolant temperature below 20°C. The coolant temperature will be maintained at 20°C. The coolant temperature will be maintained at 20°C.
System Parameters and Specifications
| Product Specification | |
|---|---|
| Output Source | Up to 3 LEDs combinations, 365 ~ 970 NM range outputs |
| Total Transmission Output* | Up to 40 W (50 W with additional cooling) |
| Luminous intensity | Up to 100,000 mW/cm² |
| Numerical Aperture | Variable, depending on concentrator |
| Control Configuration |
Independent LED power management and presets Fineness adjustment range (20-100%) LED rise time approx. 1 ms Output feedback control via internal or external signaling line monitoring |
| interactive interface |
USB: ALE/Remote (ALE PC software) PLC: Commercial Interface Fieldbus: according to customer requirements (e.g. CANopen) |
| Thermal Control | Internal air-cooled (built-in) External cooling (optional) for improved output |
| Dimensions (W H D) |
ESS: 20 cm X 13 cm X 20.5 cm (7.9" X 5.1" X 8.1") CSS: 20 cm X 15 cm X 45 cm (7.9" X 5.9" X 17.7") CSS (Rack): 44 cm X 18 cm X 37 cm (17.3" X 7.1" X 14.6") |
| weights |
ESS: 5 kg (11 lbs) CSS: 9 kg (20 lbs) CSS (Rack): 10 kg (22 lbs) |
| Power Input | 110-240 VAC / 50-60 Hz / 1,000 W |
| optical element |
Octagonal and circular light guides (26.5 mm and 28.0 mm) Customized focusing optics on demand |
| Full Spectral Accuracy | Full spectrum with no standard deviation in the spectrum (Ø8.0 mm, hexagonal enhancement option); accuracy ±10% |
Honghong will provide you with any support you need!
Our professional Honghong team will be the first to respond and provide you with the best service to solve all your problems.
