在晶圓設備運輸過程中，即使極微小的衝擊、傾斜或環境異常，都可能對晶圓結構或精密表面造成潛在影響，進而導致良率下降、返修成本增加，甚至影響交期與產線規劃。
透過全程監測衝擊、振動與定位狀態，不僅能即時掌握運輸異常並快速啟動應變機制，更可保留完整且可追溯的數據紀錄，協助企業建立責任判定與品質驗證依據，最終提升製程穩定性與客戶信任度。
highly accurate晶圓及光刻設備運輸解決方案
即時掌握微振動風險，守住關鍵設備定位與製程精度
針對 EUV／DUV 曝光設備與高價值半導體製程設備，宏虹提供可量測、可回溯的振動運輸監測方案。
透過三軸衝擊、微振動與傾斜即時紀錄，協助設備於跨廠、跨區與長距離運輸過程中，確保關鍵結構與定位精度不受影響。
產業背景
產業挑戰：晶圓運輸面臨的四大挑戰
在極度精密且高價值的環境中，晶圓運輸產業必須打造端到端、可視且可追溯的整體管控體系，以確保每一片晶圓安全抵達。
1
高脆弱性衝擊風險
晶圓厚度約 0.7–0.8 mm，對瞬間衝擊與振動條件高度敏感。
運輸過程中若衝擊或振動超出設備、載具或包裝允收範圍
可能導致微裂紋或潛在結構損傷，影響後段製程良率
異常多於後段製程或最終檢測才顯現，增加重工與交期風險
2
跨境運輸環境多變
晶圓與關鍵設備常需跨越多種運輸模式與路徑。
航空、海運與陸運交錯，氣壓、溫溼度與機械振動條件持續變化
不同路段與轉運節點易產生環境差異
若缺乏完整紀錄，將增加異常溯源與責任判定難度
3
潔淨度與環境穩定性控管困難
晶圓對微粒與環境擾動極為敏感，即使在運輸階段亦不例外。
輕微傾斜、包裝鬆動或固定不良，皆可能提高污染風險
若缺乏傾斜、振動與定位狀態的持續監測
異常一旦進入後段製程，風險將被放大並影響最終良率
4
嚴格合規/追溯要求
全球半導體供應鏈對運輸數據的要求日益明確。
需符合 SEMI、ISO 等國際標準及客戶內部規範
溫溼度、衝擊、振動與定位數據逐步成為品質稽核依據
若缺乏即時監測與完整留存，將增加合規與營運風險
解決方案：運輸風險控管與品質追溯
高脆弱性衝擊風險解決
▪️針對晶圓於運輸過程中對低頻振動與瞬間衝擊具高度敏感，透過三軸加速度監測與事件觸發機制，持續記錄衝擊峰值、持續時間與頻率分佈。
▪️可有效辨識超出運輸設計容許範圍的異常事件（如落摔、急煞、碰撞），保留完整時間戳與事件資料，作為良率異常分析與責任釐清的重要依據。
▪️監測重點：衝擊峰值（G-value）、衝擊持續時間與發生次數、三軸振動分佈與事件回放
跨境運輸環境多變因應
因應空運、海運與陸運等跨境運輸場景中常見的通訊環境差異，支援 LoRaWAN、NB-IoT、LTE-M 與 Bluetooth 等多種通訊方式彈性切換，確保資料於運輸全程穩定回傳。同時具備 IP67/IP69K 防護等級與 -20°C 至 +60°C 的工作溫度範圍，可因應長途運輸與多次轉運過程中的實際環境挑戰。
潔淨度控制強化
同步監測傾斜角度（0.1°）與溫濕度（±2% RH），於超出設定門檻時即時觸發紀錄，有助掌握因傾斜、包裝鬆動或固定不良所引發的潛在潔淨風險。搭配防塵密封包裝與定期校正機制，可降低運輸過程中微粒產生或污染風險，支援對潔淨度要求較高的製程與設備運輸。
滿足嚴苛合規與追溯
所有運輸監測資料可即時上傳雲端平台，並支援 API 串接與 CSV／JSON 匯出，方便與既有系統整合。資料格式可對應 SEMI、ISO 與 FDA 等常見稽核與品管需求，協助建立完整的運輸紀錄與事件佐證，作為內外部稽核、品質追溯與責任釐清的重要依據。
Recommended Products
推薦產品一
HH-MSR165 微型振動／衝擊資料記錄器
高精度三軸加速度資料記錄器，整合於微型堅固外殼中，適合用於高價值設備、精密零組件與半導體相關製程設備的運輸與過程監測。可完整記錄運輸或搬運過程中各時間點的振動變化與衝擊事件，提供具時間戳記的量測資料，作為運輸條件驗證、異常事件追溯與內部品質分析依據，協助工程端與採購端進行客觀評估與責任釐清。
高精確度量測
三軸加速度量測，最高取樣率達 1600 Hz，量測精度 ±0.15 g，可準確擷取低頻振動與瞬間衝擊行為，避免關鍵運輸事件被平均化或遺漏。
多種量測模式
支援連續振動記錄與事件觸發衝擊模式，可依應用需求設定門檻值，僅在超出設定條件時記錄事件，有效兼顧資料完整性與記憶體使用效率。
Professional Analysis Software
搭配 MSR PC 軟體，可進行振動波形、衝擊峰值與事件時間軸分析，輸出工程用報表，適用於內部品質審查、客戶溝通與運輸條件驗證。
彈性應用擴充
可依需求搭配溫濕度或氣壓感測，適用於精密設備運輸、製程設備監測、供應鏈驗證與長期環境量測等多元場景。
推薦產品二
HH-MSR175系列專業微型衝擊記錄器
針對高價值設備與晶圓於運輸過程中可能發生的衝擊、顛簸與環境變化，MSR175 可精準記錄關鍵運輸事件。
透過高量程三軸加速度感測，搭配溫度、氣壓與濕度等環境監測，完整保留事件發生的時間點與條件變化，協助工程與品保單位進行異常分析、責任釐清與包裝／運輸條件優化。
高量程三軸衝擊量測
內建雙量程三軸加速度感測（±15 g / ±200 g），最高取樣率達 6400 Hz，可準確捕捉運輸過程中的瞬間衝擊與顛簸事件，適用於高敏感設備與高風險運輸情境。
長時間事件資料保存
內建高容量記憶體，可儲存超過 200 萬筆量測資料，支援長途、多段運輸記錄需求，避免因資料不足影響後續異常分析與責任判定。
衝擊事件位置關聯
支援 GPS / GNSS （全球導航衛星系統）定位接收，可將重大衝擊事件與實際發生位置進行對應，協助快速鎖定高風險路段或作業節點，提升運輸改善效率。
工程分析與報告輸出
搭配 MSR 原廠分析軟體，可針對衝擊事件進行時間軸、波形與統計分析，並快速產出報告，支援內部品保檢討與對外溝通使用。
Customer Success Stories
護航億元級精密設備：護國神山台積電如何實現「零風險」跨境運輸？
半導體製程與精密設備搬運最重視的是「穩定」與「安全」！全球晶圓代工領導者台積電（tsmc）在導入宏虹MSR175plus 衝擊紀錄器後，設備工程師能精確追蹤機台在跨廠區運輸過程中的加速度與衝擊數據，確保精密設備始終處於安全閾值。
對於高昂的曝光機與光罩傳送而言，這不僅能預防潛在的硬體損害，更能大幅縮短調試與驗收時間，確保產線如期開出，同時降低後續維護成本與風險負擔！
Frequently Asked Questions
Sensitive goods such as precision machinery, chemicals or electronic equipment are exposed to a variety of risks during transportation. Whether transported by road, rail, water or air, the threat of collisions and tipping events exists both during loading and in transit. Similarly, changing environmental conditions can cause damage to the goods being transported.Data loggers use sensors to monitor various environmental parameters such as temperature, air pressure, humidity, lighting conditions and/or mechanical dynamic loads such as shocks and impacts.
Acceleration (shock, collision) is recognized as the main cause of transportation damage.
Impact events during transportation can have a very negative effect on the mechanical structure of any industrial or consumer product. Damage is not always visible externally, which makes the data recorded by acceleration sensors all the more important as they can be used to clarify liability and quality assurance issues. In addition, even if the goods being shipped are insured, the insured loss is often only a small part of a potentially much larger overall loss. Consideration must also be given to consequential losses due to incorrect transportation, such as losses due to missing goods, unplanned follow-on production, delays or business interruptions. Choosing the right impact data logger depends on the goods being transported and the purpose of the logging. Are you looking to optimize your packaging by measuring the loads on your shipment through a drop test or test shipment? Are you recording shipments as a precautionary measure so that any damage to the goods can be detected early? Is it to record shipments that last several weeks in order to comply with standards and regulations?
Temperature and humidity are important parameters in cold chain monitoring.
If the goods are perishable goods or highly regulated goods such as frozen products, pharmaceuticals, organs or even plastic components.Temperature and humidity limits and standards must be adhered to and fully documented during transportation and storage.。
Relative HumidityIt is closely related to temperature through the dew point parameter. Humidity must also be recorded, e.g. in order to be able to quickly determine the cause of corrosion on metal parts or the cause of moisture and mold damage on organic materials.
光照強度（lux）It is also an important factor for physical influences such as foodstuffs and chemicals, as solar radiation often has a damaging effect on sensitive goods. However, the "light" parameter is particularly important for detecting unauthorized operations in normally sealed containers: the incidence of light indicates that the container has been opened, which may lead to conclusions about planned or executed thefts.
Air PressureIt is also an important value which can, for example, influence the properties of deformable goods. In this context, reference should be made to hollow objects made of plastic and to deformables filled with gases or liquids. This parameter is particularly important for the transportation of air cargo, since the air pressure inside the aircraft needs to be closely monitored.
This is a very important issue. If you need to monitor weeks of overland transportation over bumpy overland routes, or months of ocean transportation, you need more storage capacity than you would need for short-haul air transportation.
The duration for which the data logger can record depends on its storage capacity and the set measurement frequency.
The following is an example of the calculation of the duration of a climatic measurement record
In order to determine the recording duration of climate measurements (temperature, relative humidity, barometric pressure), it is necessary to divide the storage capacity (number of measured values in the data logger) by the measurement frequency.
Assumption: A temperature data logger has a storage capacity of 2 million measurements. If temperature values are measured and stored twice per minute, the storage capacity of the logger is sufficient to support up to 2 years of use.
2,000,000 measurements / (2 measurements x 60 minutes x 24 hours) = 694 days
Recording of Impact Events
Data loggers differ in the way they store data. Therefore, it is not possible to establish a universally valid formula for calculating the duration of the recording of a shock event. In shock mode, theThe number of events recorded depends on the duration of the shock event and the storage capacity and mode of the data logger.. Below we compare MSR data recorders in a * table:
[wptb id="22426" not found]1) Detects shocks of ±15 g and ±200 g simultaneously.
2) Typical shock duration is 200 ms at maximum sampling rate.
3) Up to 55 days of use with GPS function, up to 1.5 years of use without GPS function.
Additional records such as climate values (temperature, humidity, pressure, light) will reduce the measurement time.
This question is important because each object responds in a specific way to the stresses applied to it.The stress on a transportation item depends directly on the item itself.For example, if a sensitive medical precision device is being transported, even minor shocks can be critical. For example, if a sensitive piece of medical precision equipment is being transported, even a minor shock can be critical, whereas when transporting a machine bed, the critical conditions are somewhat higher. For a shock to be critical, it must have a certain minimum acceleration and a minimum time during the shock. Criticality is different for each transportation item and depends on its individual state.
Basically, the mechanical stresses and the actual effects on the object should be determined by means of acceleration sensors in real (transportation) loading processes.
Will the cargo be monitored and transported by rail, road, water or air?Depending on the mode of transportation, cargoes are subject to different accelerationsThe storage capacity of the air cargo system is also very high. If a truck needs to be monitored over a rugged overland route lasting several weeks, or over the course of several months of ocean transportation, a larger storage capacity is required than for short-term air cargo.
In order to ensure that the data logger is carried in a meaningful way to recordLoad Multiplier，必須選擇具有適當測量範圍的感測器。測量範圍指定了可記錄的最大值（例如±15 g或±200 g）。衝擊負載以重力加速度的倍數來指定（重力加速度為g = 9.81 [m/s²]）。
For example, for monitoring pallet stacking, i.e., measuring minor shocks, a ±15 g sensor is usually sufficient. For more intense shocks, such as those that occur during unloading/loading into a truck or during shipping, it is often recommended to use a data logger with a ±200 g sensor and a high measurement rate to record shocks at a higher resolution. The measurement or sampling rate is the number of g measurements per unit time (usually per second in Hertz). The measurement rate determines the accuracy of the acceleration event.
為了能夠準確記錄運輸負載，已經證明數據記錄器應該每秒記錄超過1,000次，以便能夠很好地繪製g值曲線Basically, the higher the measurement rate, the more accurately the actual processes and peaks are mapped. Basically, the higher the measurement rate, the more accurately the actual processes and peaks can be mapped. Of course, this is done on three geometrical spatial axes (x, y, z) in order to obtain acceleration values in all directions.
This question is similar to the previous one onIssues related to type of cargo, duration and mode of transportationTherefore, it is important to choose a data logger with a high enough storage capacity to ensure that no critical shock events are missed. It is therefore important to choose a data logger with a sufficiently high storage capacity to ensure that no critical shock events are missed. This is the only way to ensure that the measurement data is meaningful. Next, we will compare the MSR data loggers in the table below:
1) Detects shocks of ±15 g and ±200 g simultaneously.
2) Typical shock duration is 200 ms at maximum sampling rate.
3) Up to 55 days of use with GPS function, up to 1.5 years of use without GPS function.
Additional records such as climate values (temperature, humidity, pressure, light) will reduce the measurement time.
When selecting a data logger, special attention needs to be paid to evaluating the software.Evaluation software must be able to process millions of data quickly.。Determining the relevant impact event must be quick and easyIt must also be able to check and export the data curve or measurement point for each individual shock.
For example, when a shock event occurs, it is not sufficient to know the peak acceleration; the associated duration of the shock is equally important, as this can be used to determine the strength of the shock, either directly or by comparison with other shocks on the object. Two impacts of the same strength may have different effects on the object because the duration of the impact and the absolute value of the acceleration always determine the effect on the object.
In the MSR ShockViewer software, which is supplied with the MSR165, MSR175 and MSR175plus acceleration data loggers, shock events can be filtered by intensity value (IoT) and pulse time (Tot) in order to focus the analysis on the most severe events. Spectral analysis data for selected shock events can be displayed and exported in tabular or graphical form.可用多種類型的頻譜分析（例如振幅，功率譜等）和多種類型的加權視窗（例如矩形、高斯、漢明等）。
Vibration measurement with DataCORDER MSR165
If you also wish to use a data logger for vibration measurements, we recommend the MSR165 data logger.In addition to recording in shock mode, the MSR165 can record vibration data continuously.The following is an example of a measurement of a vibration. In order to record the vibration data correctly, it is necessary to select an appropriately high sampling rate for the measurement based on the vibration characteristics. Due to the large amount of data, the duration of recording is limited. You can use theIncrease the storage capacity of the MSR165 (standard ≥ 2 million measurements) to over 1 billion measurements using a microSD card.。
In the following table, you can see the two data logger versionsMSR165B8(LiPo battery 1000mAh) andMSR165B52(Li-SOCl2 cell 3.6V, 2 x 7700mAh) for different sampling rates corresponding to the approximate recording duration.
Additional records (e.g. climate values: temperature, humidity, air pressure, light) will reduce the measurement time.
For more information, please refer to our basic information on acceleration measurement.
*Information is as of March 2023 and is subject to change and/or error.
The sampling or measurement rate is the number of g measurements made per unit of time (usually per second in Hz).Measurement rate determines the accuracy of the recording of acceleration events.The higher the measurement rate, the more detailed the analysis of the actual process of the acceleration event. The higher the rate of measurement, the more detailed the actual course of the acceleration event can be resolved. In order to be able to accurately record transportation loads, it has been shown that the data logger should record at a rate of more than 10,000 measurements per second in order to be able to plot the g-value curve correctly. Of course, this should be done on three geometric axes (x, y, z) to obtain acceleration values in all directions.
The disadvantage of high measurement rates is that the amount of data is very large and the storage and performance limitations of the logger may be quickly reached. Continuously measuring, processing or storing data also results in high power consumption, which limits the mobile runtime of the logger. With event-based measurements, it is possible to record specific shocks that exceed a critical duration and/or intensity. In addition to improving the clarity of long-term measurements, this has the advantage of recording only the relevant events, thus utilizing energy and storage capacity more efficiently.
Setting Threshold
If the focus of the measurement task is not on short-term shock analysis but on long-term monitoring, thresholds can be set to record shocks that exceed a specific preset g value (threshold) and minimum shock duration (ToT). This process saves storage capacity as only relevant events are recorded. In this case, it also makes sense to store some g-values before and after the event so that the data can be evaluated for the entire event. With the MSR Transport Data Recorder, 32 measurement points before the event and 100 measurement points after the event are automatically saved for each axis.
If you want to know and, if necessary, prove where and when your transported goods are going, then a data logger such as the MSR175plus with GPS tracking can be very helpful as the recorded data can be used toQuickly locate key transportation events。
If you want to know and, if necessary, prove where and when your transported goods go, then something like the accompanyingGPS追蹤功能的MSR175plus數據記錄器may be helpful, as the recorded data can be used to quickly locate critical transportation events.
所有包含鋰聚合物電池的數據記錄器在空運時均受到國際航空運輸協會（IATA）的特定規定限制。 MSR運輸數據記錄器符合更嚴格的航空安全條件。
宏虹環境監測專家
晶圓及光刻設備運輸解決方案
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