ALE/2 UV-LED Exposure System
Function Overview:
The ALE/2 UV-LED exposure system is a High-performance UV spot light sourceApplicable to Large Area Substrate Lithography and Flood Exposure. Provide i-line (365 nm) vs. broadband (365/405/436 nm) Mode, light output stabilization, comparable to the 5,000 W high pressure mercury lampThe Built-in Independent LED management and closed-loop light output controlThis ensures power stability and is suitable for 8" and 12" Mask Aligners. Support PLC, USB, Ethernet / MODBUS TCP/IP Communications, using Liquid Cooling Technology Ensures long run times. Modular design allows LEDs can be quickly replacedThe new technology reduces maintenance costs and improves the efficiency of lithography applications.
Description
Distributed Design Integration
ALE/2 Exposure Light Source FollowDecentralized design approachUsuallyConsists of a control subsystem (CSS) and a separate exposure subsystem (ESS).The ESS can be directly connected to the exposure system.
Control Subsystem (CSS)
Can be used as a 4U 19" rack mount system
Includes power supply, cooling system and external interfaces
Exposure Subsystem (ESS)
Innovative optical design for direct integration into exposure equipment
Includes i, h and g line emitters, and LED drivers
ALE/2 UV-LED Exposure System Replaces Traditional 2 - 5 kW Housings
Primelite's UV-LED Exposure System Advanced Light Engine II (ALE/2) is a high-performance UV spot light source for large-substrate industrial flood exposure tools that require perfectly uniform and collimated radiation, either in 8-inch (200 mm) or 12-inch (300 mm) mask aligners. Its UV output is powerful enough to power larger setups with square exposure areas up to 400 X 400 mm - and in some cases even larger.The ALE/2 utilizes UV-LED technology, which provides excellent output stability and flexible spectral control, superior to traditional high-pressure mercury discharge lamps. It also consumes less power, doesn't generate as much heat, lasts longer, and requires minimal overall maintenance.
The ALE/2 UV-LED Exposure System leverages Primelite's technology platform, allowing you to combine four feedback-controlled, high-power UV LEDs in the light path. i-line (CWL 365 nm) and broadband (CWL 365 / 405 / 436 nm) configurations are available. In a single i-line process, the ALE/2 UV-LED Exposure System offers performance comparable to conventional discharge lamps rated up to 5,000 W. For broadband use cases, the ALE/2 UV-LED Exposure System can be utilized in a wide range of applications. For broadband applications, the illumination power is comparable to a 2,000 W discharge lamp.
Primelite Lithography UV-LED Exposure System ALE/2 (Controller and Exposure Subsystem)
ALE/2 UV-LED exposure system highlights:
- Built-in solutions for maximum exposure efficiency and performance
- Up to 70 watts of i-line exposure (CWL 365 nm)
- Broadband exposure up to 80 watts (350 - 450 nm)
- Closed-loop controlled light output for maximum process stability
- Mercury-free! Safe and future-proof LED light source
- UV-LED technology for longer life and lower TCO
- Quality made in Germany
Exposure Light System
The following table shows the specifications of Macrohon's exposure light source system, some parameters are subject to customization.
| Light Source Type | LED | |
|---|---|---|
| Center Wavelength | Standard wavelength | 365nm, 385nm, 405nm, 435nm |
| Test Wavelength | 367.5±2.5 nm, 387.5±2.5 nm, 402.5±2.5 nm, 435.0±2.5 nm | |
| FWHM | 10-15nm (actual data subject to factory test) | |
| optical power | Single wavelength 17-30W | |
| Light area | 4"-12" (customizable) | |
| power density | 25-150mW/cm² (depending on wavelength and area) | |
| Light uniformity | ≥97% | |
| parallel half-angle range (math.) | ≤3° | |
| Working distance | 100-400mm (can be customized according to specific requirements) | |
| Cooling Method | Liquid Cooling, Thermoelectric Cooling | |
| Life expectancy | Standard Range | Exposure time 1000-30000 hours |
| reference value | 5000 Exposure Hours - 50mW/cm² - 50% duty | |
ALE/2 UV-LED Exposure System Outputs
Our standard ALE/2 setup combines LED modules with peak wavelengths around the i-line (365 nm), h-line (405 nm) and g-line (436 nm) of the mercury spectrum. A pure i-line column configuration is also available. All UV-LED emitters can be individually controlled, so you can switch wavelengths and customize the composition of the output spectrum without changing filters.
Spectrum
Angular distribution (to spotting scopes)
| Power Type | Radiant power (mW)¹ | |
|---|---|---|
| Broadband (350 - 450 nm) | i-line (365 nm) | |
| ALE/2 (standard performance) | 80,000 | 70,000 |
| ALE/2 (standard mode) | 70,000 | 60,000 |
¹ Deviation may be ±10%
- Our ALE/2 provides up to 70 W of total output in standard mode and 80 W in performance mode.
- To activate Performance Mode, you need to add a cooler to the cooling circuit to keep the coolant temperature below 20°C. The coolant temperature will be set to 20°C. The coolant temperature will be set to 20°C.
System Parameters and Specifications
| Properties | Specification |
|---|---|
| Wavelength Selection | 4 LEDs with CWL 365 nm, 385 nm, 405 nm, and 436 nm |
| Numerical Aperture | With standard concentrator: NA 0.3 (2α ~35°) |
| Output Control |
+ Single LED power management and presets + High Resolution Intensity Adjustment (10-100%) + LED rise time less than 1 ms + Continuous monitoring of fiber output and feedback control |
| communication interface |
+ Discrete PLC Interface (TTL) + USB (Serial) + Ethernet/Modbus (optional) |
| Thermal Management |
+ Liquid cooling of internal radiators + optional thermoelectric cooler (required for performance mode operation) |
| Dimensions (W x H x D) |
ESS: 21 × 21 × 36 cm (8.3 × 8.3 × 14.2″) CSS (Rack): 44 × 18 × 37 cm (17.3 × 7.1 × 14.6″) |
| weights |
ESS: 4 kg (9 lbs) CSS (Rack): 10 kg (22 lbs) |
| Power Supply | 110 - 240 VAC / 50 - 60 Hz / 1,500 W |
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